Mini Coater Developer Tracks
Mini Coater Developer Spin Tracks
SemiAutomated Photoresist Spin Equipment
Mini Spin Track is equipped with a full featured coater and developer. Wafers are manually fed to the spin station. The substrate centering and spin processing are fully automated.
100s of systems installed!
Three Year Warranty!
Brand name 'off the shelf' components!
Accommodates
multiple wafer sizes
Spin Station
0-30K RPM
Spin station Centering
Shown Here
PC Based Control
Unlimited Recipes
200mm Footprint
53" x 32" x 46" tall
Spin stations can have multiple resists, backside rinse, bowl wash, vapor tip bath, suckback, pre-wet, spray coating, pump or canister driven, stream & puddle develop, bowl rinse, mini environment, temperature controlled delivery lines, stepper motor accuracy, chemical cabinets made to suit
53"
EXAMPLE: 200mm & 150mm
Coater Developer Top View
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Semiconductor Fabrication
Products and Services
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Semitool Seals
Photolithography Spin Tracks
Products:
Single Wafer Spin Cleaner
Mini Coater Developer
Wafer Transfer Equipment
Wet Process Equipment
Manual & SemiAuto Benches
Used Wet Process Equipment
UltraPure Chemicals
Diffusion Furnaces
Remote Plasma Clean
Metal Lift Off Equipment
Custom Automation Services
Reticle Storage
Table Top Wafer Sorters
Wafer Transfer Systems
Single Wafer Vacuum Bake
Photomask Cleaners
Semiconductor O-Rings
CMP Tools & Foundry Services
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