Benchtop ALD Equipment For Sale
Tabletop ALD Equipment
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IPA & Marangoni Dryers
Would your research benefit by having access to Thin Films grown by ALD? Until now, ALD tools have been too expensive for most Universities and Research Scientists. We’ve engineered a low cost table top solution to specifically address this niche.
Included with the AT400 (4”) ALD System:
- Deposition system with integrated controller
- Quick change flat sample holder with edge
   guard (custom holders available)
- All exterior connections for precursor bottles,
  process gasses, power, and vacuum.
- Proven Process Recipes for many materials
  such as Al2O3, Pt, Ru, HfO2, TiO2, ZrO2,
  ZnO, Al:ZnO,TiN…
- Documentation - Digital manual along with
  training and maintenance videos available
  online and by USB.
- 1 Year Parts & Labor
- Process Development Support
- Extendable Warranty Services
- Precursor bottles (empty) with shut-off valve
- Custom heater jackets for precursors
- Enhanced temperature control 35C—150C
- Inert gas pressure assist for low vapor
  pressure precursors
- Vented precursor cabinet
System Highlights:
- Chamber designed and optimized for typical
   R&D substrates (samples) up to 4” in diameter
- Fixture can be modified for specialty samples
- Chamber temperature range is RT to 350C
- Precursor temperatures can be managed by
   optional heater jackets
- Process pressure is user adjustable from 0.1 to 1.5 Torr
- Up to 5ea ALD precursor sources:
- 3ea organometallic or other metal sources
- 2ea oxidants/reduction sources
- System is completely metal sealed upstream of
   sample - Fast Cycling capability
- High aspect ratio deposition with excellent
   conformal coverage
- Precise precursor dosing with defined dose
- Robust 6” touch screen PLC control system
- Simple and accessible system maintenance
- Safety interlocks
- Smallest footprint on the market
Tabletop ALD Equipment