Table Top Wafer Sorters

Table Top Wafer Sorters | Single Wafer Transfers

Tabletop Wafer Sorters & Scribe Readers

Semiconductor Sorters

These mini table top sorters are useful for any wafer sorting task.
A common application is the loading and unloading of spin cleaners and SRDs. Such tools require a balanced load. Most FABs rely on operators to manually load and unload wafers using vacuum wands or tweezers. With a table top sorter, that dummy management task is completely automated.

Over 1500 wafer handling systems installed globally.
These tools are FAB proven, reliable, and safe.

Mini Sorter (Features):

Graphical User Interface - Touch Screen
Wafer mapping displays graphically
Drag and drop transfers via touch screen
Sorter Recipes (split, merge, randomize, compact, user created)
Dummy management by pick and place
Host driven sorting via SECs/GEM
Inspection Mode - presents the wafer to the user for inspection and opens software dialog box (Accept | Reject)
Available with backside vacuum paddle, edge gripper, or Bernoulli chuck
Available with flipper mechanism for backside inspection
Cross slot detection
Sensors to prevent wafer breakage mistakes
USA based sales and service support