Desktop Diffusion Furnace
Oxidation | Anneal | CVD
Bench Top Diffusion Furnaces
Small stackable diffusion furnaces suitable for semiconductor wafer processing. Integrated zero clearance load station accommodates 25 wafer loads. PC based 5 zone temperature control with Ethernet or optional SECsGEM connectivity.
Gas box and controls are made to suit any atmospheric or CVD process. Excellent temperature control and reliability by using industry proven ICCI controller. There are over 1500 such controllers in the field.
Automated Boat Loader
Easy to Use GUI
Industry Prove ICCI Controller
32" wide X 35" deep X 24" tall
Add 30" of clearance for load station in open position
Our systems are brand new and custom configured to your process needs. They are fully warranted and come with installation, start-up, training, and continued support.
Semiconductor Fabrication
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